ERL MEMS Electrical Interconnect Elements
The levered mechanical switches create a mechanical connection via a
500um electrostatically actuated lever arm, intended to reduce actuation
voltage. On the chip are 4 different configurations, for testing 3
different polysilicon spring structures and 2 methods of electrical
The rotating switches are single- and two-way switches based on the
micro-motor design. A contact arm in each is actuated either electro-
statically or electromagnetically.
Scraping switches provide a less resistive mechanical metal-metal
connection. A scraping motion is made when moving the switches in and
out of contact in order to remove oxides that may have built up. All
of these on-of switches can be actuated electrostatically or
electromagnetically, by application of voltage or current to the
appropriately connected pads.
These electrical switches were designed for crossbar network applications.
Latching, actuated by electrostatic deformation, occurs when the individual
elements are strobed.
here to return to the ERL Homepage.
Emmanuel Maitre, Mouna Nakkar,
and Paul Franzon