ERL Microelectromechanical (MEMS) Interconnect Project
The ability to create microelectro-mechanical systems, dubbed
the same surface and with the same fabrication process as integrated
circuits will give future chip makers an explosion of options in
their designs. MEMS,
by itself, enables designers to create motors,
sensors, and actuators on the micron scale. Nevertheless, the real
benefits of this technology will be realized as a result of
manufacturability. Because MEMS designs can be implemented in the
same thin-film and doped silicon that make up IC's, designers can
easily integrate this technology into VLSI and ULSI, creating
designs for a broader range of applications without a major increase in
We are investigating MEMS design for applications in
bandwidth optical routing, optical scanners and laser radar,
speed digital switching and RF electrical
Current Students Working on these projects:
PhD student working on Applications of MEMS to High Speed Interconnect.
PhD student working on Novel Interconnect Circuits.
MS student working on Optical Interconnect.
MS student working on Applications of MEMS to High Speed Interconnect.
PhD student working on Applications of MEMS to RF and Microwaves.
PhD student working on Applications of MEMS to Laser Radar.
Overview of Research Chips
Use the clickable maps of our chips
to see some device designs and layouts.
3-D Visualization Demo!
For those with browsers configured to view
VRML files (Virtual Reality Modeling
Click here to return to the ERL Homepage.
Last Modified On: Mar 17 18:27:09 EDT 2001
Last Modified By: Ravi Raina