ERL Microelectromechanical (MEMS) Interconnect Project

ERL MEMS Interconnect Design
















The ability to create microelectro-mechanical systems, dubbed MEMS, on the same surface and with the same fabrication process as integrated circuits will give future chip makers an explosion of options in their designs. MEMS, by itself, enables designers to create motors, sensors, and actuators on the micron scale. Nevertheless, the real benefits of this technology will be realized as a result of manufacturability. Because MEMS designs can be implemented in the same thin-film and doped silicon that make up IC's, designers can easily integrate this technology into VLSI and ULSI, creating designs for a broader range of applications without a major increase in technology cost.

We are investigating MEMS design for applications in high bandwidth optical routing, optical scanners and laser radar, and high speed digital switching and RF electrical signal routing.




Current Students Working on these projects:

  • Bruce Duewer. PhD student working on Applications of MEMS to High Speed Interconnect.
  • Umut Eksi. PhD student working on Novel Interconnect Circuits.
  • Som Palchuadhury. MS student working on Optical Interconnect.
  • John Tucker. MS student working on Applications of MEMS to High Speed Interconnect.
  • John Wilson. PhD student working on Applications of MEMS to RF and Microwaves.
  • David Winick. PhD student working on Applications of MEMS to Laser Radar.

  • Overview of Research Chips

    Use the clickable maps of our chips to see some device designs and layouts.


    3-D Visualization Demo!

    For those with browsers configured to view VRML files (Virtual Reality Modeling Language),


    Related Information


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    David Winick

    Last Modified On: Mar 17 18:27:09 EDT 2001 Last Modified By: Ravi Raina