Contact Information
Address
322-C Monteith
Campus Box 7920
NC State University
Raleigh, NC 27695-7920
Locate on Campus Map
Phone
919-515-5245
Fax
919-515-3055
Director, TNLC and NNF
| Biography
Dr. Ozturk's research interests center around new materials, processes and device structures for nanoelectronics. His recent work emphasizes applications of low temperature epitaxy of Si and SiGe for source/drain and channel engineering and low-resistivity contacts to Si and SiGe.
| Education
- 1980 - BS in Electrical Engineering, Bogazici University, Istanbul, Turkey
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1983 - MS in Electrical Engineering, Michigan Technological University, Houghton, MI
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1988 - PhD in Electrical Engineering, North Carolina State University, Raleigh, NC
| Primary Research Interests
- Nanoelectronics and Photonics (Including Nanotechnology, Silicon Devices and Fabrication)
| Selected Publications
- Emre Alptekin,Mehmet C. Ozturk,Veena Misra,Yonah Cho,Yihwan Kim and Saurabh Chopra, "Erbium Silicide Formation on Si:C Epitaxial Layers", Journal of The Electrochemical Society, Vol. 156, H378-H383 (2009)
| Awards and Honors
- 2009 - IEEE Fellow, Contributions to Silicon and Silicon-Germanium Epitaxy in Complementary Metal-Oxide Semiconductor Integrated Circuits.
- 2006 - IEEE Undergraduate ECE Teacher of the Year Award (NC State)
- 2005 - IEEE Senior Member
- 1995 - Presidential Faculty Fellow Award