Contact Information

322-C Monteith
Campus Box 7920
NC State University
Raleigh, NC 27695-7920
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Dr. Mehmet C Ozturk

Director, TNLC and NNF

| Biography

Dr. Ozturk's research interests center around new materials, processes and device structures for nanoelectronics. His recent work emphasizes applications of low temperature epitaxy of Si and SiGe for source/drain and channel engineering and low-resistivity contacts to Si and SiGe.

| Education

  1. 1980 - BS in Electrical Engineering, Bogazici University, Istanbul, Turkey
  2. 1983 - MS in Electrical Engineering, Michigan Technological University, Houghton, MI
  3. 1988 - PhD in Electrical Engineering, North Carolina State University, Raleigh, NC

| Primary Research Interests

  1. Nanoelectronics and Photonics (Including Nanotechnology, Silicon Devices and Fabrication)

| Selected Publications

  1. Emre Alptekin,Mehmet C. Ozturk,Veena Misra,Yonah Cho,Yihwan Kim and Saurabh Chopra, "Erbium Silicide Formation on Si:C Epitaxial Layers", Journal of The Electrochemical Society, Vol. 156, H378-H383 (2009)

| Awards and Honors

  • 2009 - IEEE Fellow, Contributions to Silicon and Silicon-Germanium Epitaxy in Complementary Metal-Oxide Semiconductor Integrated Circuits.
  • 2006 - IEEE Undergraduate ECE Teacher of the Year Award (NC State)
  • 2005 - IEEE Senior Member
  • 1995 - Presidential Faculty Fellow Award