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Contact Information

Address
223-C Monteith
Campus Box 7911
NC State University
Raleigh, NC 27695-7911
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Phone
 919-515-7356
Fax
 919-515-5055
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Dr. Veena Misra

Professor

| Biography

Research Interests: MOSFET Device Design, Advanced Gate Stacks, CMOS Process integration, fabrication and characterization of thin films, chemical vapor deposition and high vacuum technology.

| Education

  1. 1990 BS in Electrical Engineering, North Carolina State Univ
  2. 1992 MS in Electrical Engineering, North Carolina State Univ
  3. 1995 PhD in Electrical Engineering, North Carolina State Univ

| Primary Research Interests

  1. Nanoelectronics and Photonics (Including Nanotechnology, Silicon Devices and Fabrication)

| Other Research Interests

  1. Power Electronics and Power Systems (Including Power Semiconductor Devices)

| Selected Publications

  1. V.Misra, W.K. Henson, E.M. Vogel, G.A. Hames, J.R. Hauser, and J.J. Wortman, "Electrical Properties of Composite Gate Oxides formed by Rapid Thermal Processing", Transactions on Electron Devices, Apr 1996.
  2. V. Misra, X-L. Xu, G.A Hames, R.T. Kuehn, D.S. Miles, P.K. McLarty, J.R. Hauser and J.J. Wortman, "Formation of High Quality Gate Dielectrics by Rapid Thermal Chemical Vapor Deposition", Journal of Electronic Materials, March 1996.
  3. V. Misra, S.V. Hattangady, T.Yasuda, X-L. Xu, B. Hornung, G. Lucovsky and J.J. Wortman, "Low Temperature Plasma-Assisted Oxidation Combined with insitu Rapid Thermal Oxide Deposition for Stacked Gate Si-SiO2 heterostructures: Integrated processing and device studies", J. Vac. Sci. Techn. A. Jul/Aug 1994.
  4. B. Maiti, P.J. Tobin, V. Misra, R.I. Hedge, K.G. Reid, C. Gelatos, "High Performance 20Å Oxynitride for Gate Dielectric in Deep Sub-Quarter Micron CMOS Technology" IEDM Tech. Dig. 1997.
  5. S. Venkatesan, A.V. Gelatos, V. Misra, B. Smith, R. Islam, B. Wilson, D. Tuttle,R. Cardwell, S. Anderson, et.al." A High Performance 1.8V, 0.20µm CMOS Technology with Copper Metallization", IEDM Tech. Dig. 1997.

| Awards and Honors

  • 2007 - Outstanding Alumni Research Award (NC State)
  • 2002 - ALCOA Foundation Engineering Research Award (NC State)
  • 2001 - NSF Presidential Early CAREER Award for Scientist and Engineers (PECASE) Recipient