Experimental Determination of On-Chip Interconnect Capacitances
In this report
we present a novel method for the measurement of interconnect
capacitance, atomic capacitance microsopy. We also present VLSI
structures which allow correlation of ACM and traditional (VNA,
TDR, direct capacitance) measurement techniques.
NOTE: This final version replaces April 1995 & June 1995 releases.
WARNING: Large file (approx 3 MB).
Michael B. Steer, Paul D. Franzon, Alan W. Glaser, Phil Russell, Gordon Shedd