Contact Information

218-E Monteith
Campus Box 7911
NC State University
Raleigh, NC 27695-7911
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Dr. Veena Misra

Director of NSF ASSIST Center

| Biography

Research Interests: Metal oxide sensors, power devices, III-As and III-N based devices, atomic Layer deposition, nanoparticles for memory and energy storage, high-K and metal gates, organic photovoltaics and solar fuels

| Education

  1. 1991 - BS in Electrical Engineering, North Carolina State Univ, Raleigh, NC
  2. 1992 - MS in Electrical Engineering, North Carolina State Univ, Raleigh, NC
  3. 1995 - PhD in Electrical Engineering, North Carolina State Univ, Raleigh, NC

| Primary Research Interests

  1. Physical Electronics, Photonics & Magnetics (Including III - V Materials and Devices, Silicon Devices and Fabrication)

| Other Research Interests

  1. Power Electronics and Power Systems (Including Electronic Energy Systems Packaging, Power Semiconductor Devices)

| Selected Publications

  1. Rahul Suri, Daniel J. Lichtenwalner and Veena Misra, “Interfacial self cleaning during atomic layer deposition and annealing of HfO2 films on native (100)-GaAs substrates”, Accepted Appl. Phys. Lett. 96 (1), 2010.
  2. Rahul. Suri, Casey. Kirkpatrick, Dan Lichtenwalner and Veena Misra, “Energy-band alignment of Al2O3 and HfAlO gate dielectrics deposited by atomic layer deposition on 4H SiC, Applied Physics Letters, 96, 042903, 2010.
  3. Zhong Chen, Smita Sarkar, Nivedita Biswas, and Veena Misra, “Atomic Layer Deposition of Hafnium Dioxide on TiN and Self-Assembled Monolayer Molecular Film”, J. Electrochem. Soc. 156 H561 (2009)
  4. Yong Luo and Veena Misra, “Large area nanorings fabricated using an atomic layer deposition Al2O3 spacer for magnetic random access memory application”, Nanotechnology, 19, 26, 265301, Jul 2008.
  5. Arun Suresh, Steven Novak, Patrick Wellenius, Veena Misra, and John F. Muth, “Transparent indium gallium zinc oxide transistor based floating gate memory with platinum nanoparticles in the gate dielectric”, Appl. Phys. Lett. 94, 123501 (2009)

| Awards and Honors

  • 2012 - 2011 Alcoa Foundation Distinguished Engineering Research Award
  • 2012 - Director, NSF ASSIST Nanosystems Engineering Research Center
  • 2011 - ALCOA Foundation Distinguished Engineering Research Award (NC State)
  • 2011 - IEEE Fellow, for contributions to metal electrodes and high-K dielectrics for CMOS applications
  • 2007 - Outstanding Alumni Research Award (NC State)
  • 2002 - ALCOA Foundation Engineering Research Award (NC State)
  • 2001 - NSF Presidential Early CAREER Award for Scientist and Engineers (PECASE) Recipient